Inventor
CHEN JU-KAU
TW4 patents
Patents
4 patentsUS7254457B1Aug 7, 2007
Manufacturing process control methods and systems
TAIWAN SEMICONDUCTOR MFG21 citations83
US7031786B2Apr 18, 2006
System and method for fabrication backup planning
TAIWAN SEMICONDUCTOR MFG4 citations58
US6963785B2Nov 8, 2005
Method for target queue time calculation in semiconductor manufacturing planning
TAIWAN SEMICONDUCTOR MFG6 citations58
US7206653B1Apr 17, 2007
Wafer-based planning methods and systems for batch-based processing tools
TAIWAN SEMICONDUCTOR MFG3 citations57