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Inventor
JONSSON STEFFAN
SE
2 patents
⚠️ This page may combine multiple inventors who share the name “JONSSON STEFFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR
1 patent
US7389697B2
Jun 24, 2008
Pressure sensor for detecting small pressure differences and low pressures
MKS INSTR
16 citations
85
MKS INSTR INC
1 patent
US7284439B2
Oct 23, 2007
Method for producing a pressure sensor for detecting small pressure differences and low pressures
MKS INSTR INC
23 citations
85