P

Inventor

ELSTER THOMAS

DE6 patents
⚠️ This page may combine multiple inventors who share the name “ELSTER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYS LITHOGRAPHY LTD

3 patents
US6600162B1Jul 29, 2003

Method and device for exposing a substrate to light

LEICA MICROSYS LITHOGRAPHY LTD18 citations77
US6541776B1Apr 1, 2003

Device for electrostatic deflection of a particle beam

LEICA MICROSYS LITHOGRAPHY LTD2 citations59
US7491946B2Feb 17, 2009

Electrostatic deflection system for corpuscular radiation

LEICA MICROSYS LITHOGRAPHY LTD0 citations48

VISTEC ELECTRON BEAM GMBH

2 patents
US7601969B2Oct 13, 2009

Illumination condenser for a particle optical projection system

VISTEC ELECTRON BEAM GMBH2 citations59
US7560713B2Jul 14, 2009

Correction lens system for a particle beam projection device

VISTEC ELECTRON BEAM GMBH5 citations59

DOERING HANS-JOACHIM

1 patent
US8148702B2Apr 3, 2012

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

DOERING HANS-JOACHIM16 citations76