Inventor
WANG XIANGZHAO
CN13 patents
⚠️ This page may combine multiple inventors who share the name “WANG XIANGZHAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHANGHAI INST OPTICS & FINE MECH CAS
12 patentsUS11009336B2May 18, 2021
Method for wavefront measurement of optical imaging system based on grating shearing interferometry
SHANGHAI INST OPTICS & FINE MECH CAS3 citations71
US11029611B2Jun 8, 2021
Device and method for detecting projection objective wave-front aberration
SHANGHAI INST OPTICS & FINE MECH CAS2 citations70
US11604418B2Mar 14, 2023
Multi-channel device and method for measuring distortion and magnification of objective lens
SHANGHAI INST OPTICS & FINE MECH CAS2 citations69
US9658114B1May 23, 2017
Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration
SHANGHAI INST OPTICS & FINE MECH CAS5 citations68
US9766154B2Sep 19, 2017
Multi field point aberration parallel metrology device and method for lithographic projection lens
SHANGHAI INST OPTICS & FINE MECH CAS3 citations63
US10969274B2Apr 6, 2021
Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer
SHANGHAI INST OPTICS & FINE MECH CAS1 citations60
US11215512B2Jan 4, 2022
Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof
SHANGHAI INST OPTICS & FINE MECH CAS1 citations59
US11561082B2Jan 24, 2023
Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry
SHANGHAI INST OPTICS & FINE MECH CAS0 citations51
US11340118B2May 24, 2022
Method for high-accuracy wavefront measurement base on grating shearing interferometry
SHANGHAI INST OPTICS & FINE MECH CAS0 citations50
US11788829B2Oct 17, 2023
Simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration
SHANGHAI INST OPTICS & FINE MECH CAS0 citations48
US11668625B2Jun 6, 2023
Apparatus and method for detecting wavefront aberration of objective lens
SHANGHAI INST OPTICS & FINE MECH CAS0 citations46
US9863841B2Jan 9, 2018
Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof
SHANGHAI INST OPTICS & FINE MECH CAS0 citations35