P

Inventor

JASPER JOHANNES CHRISTIAAN MARIA

NL11 patents
⚠️ This page may combine multiple inventors who share the name “JASPER JOHANNES CHRISTIAAN MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

7 patents
US9606448B2Mar 28, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations73
US9304411B2Apr 5, 2016

Lithographic method and apparatus

ASML NETHERLANDS BV3 citations72
US9791787B2Oct 17, 2017

Lithographic method and apparatus

ASML NETHERLANDS BV1 citations62
US11422472B2Aug 23, 2022

Patterning process improvement involving optical aberration

ASML NETHERLANDS BV0 citations54
US10146142B2Dec 4, 2018

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US9442388B2Sep 13, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US9904180B2Feb 27, 2018

Lithographic method and apparatus

ASML NETHERLANDS BV0 citations51

LOOPSTRA ERIK ROELOF

1 patent
US8208123B2Jun 26, 2012

Lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF6 citations82

VAN BOXTEL FRANK JOHANNES JACOBUS

1 patent
US8675169B2Mar 18, 2014

Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method

VAN BOXTEL FRANK JOHANNES JACOBUS4 citations66

BASELMANS JOHANNES JACOBUS MATHEUS

1 patent
US8681309B2Mar 25, 2014

Lithographic apparatus and device manufacturing method

BASELMANS JOHANNES JACOBUS MATHEUS1 citations49

ZHANG SHAOXIAN

1 patent
US9423701B2Aug 23, 2016

Lithographic method and assembly

ZHANG SHAOXIAN0 citations41