Inventor
LEW JEN SERN
SG8 patents
⚠️ This page may combine multiple inventors who share the name “LEW JEN SERN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9845533B2Dec 19, 2017
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC3 citations71
US11111583B2Sep 7, 2021
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC0 citations61
US10978334B2Apr 13, 2021
Sealing structure for workpiece to substrate bonding in a processing chamber
APPLIED MATERIALS INC0 citations61
US10549324B2Feb 4, 2020
Method and apparatus for backside cleaning of substrates
APPLIED MATERIALS INC0 citations51
US9993853B2Jun 12, 2018
Method and apparatus for backside cleaning of substrates
APPLIED MATERIALS INC0 citations51
US10607870B2Mar 31, 2020
Substrate carrier for active/passive bonding and de-bonding of a substrate
APPLIED MATERIALS INC0 citations50
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49