Inventor
STAVENGA MARCO KOERT
NL61 patents
⚠️ This page may combine multiple inventors who share the name “STAVENGA MARCO KOERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
34 patentsUS7733459B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV66 citations97
US7880860B2Feb 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations96
US7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7710537B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7423720B2Sep 9, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations92
US7397533B2Jul 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations92
US9703210B2Jul 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9581914B2Feb 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9454088B2Sep 27, 2016
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV4 citations84
US7900641B2Mar 8, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV12 citations82
US8018573B2Sep 13, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US9772565B2Sep 26, 2017
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations73
US7378025B2May 27, 2008
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US11187991B2Nov 30, 2021
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations70
US7914687B2Mar 29, 2011
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US9164391B2Oct 20, 2015
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations62
US12197140B2Jan 14, 2025
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11215933B2Jan 4, 2022
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11204558B2Dec 21, 2021
Particle suppression systems and methods
ASML NETHERLANDS BV1 citations61
US7522258B2Apr 21, 2009
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
ASML NETHERLANDS BV3 citations60
US12072635B2Aug 27, 2024
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations58
US10712675B2Jul 14, 2020
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV0 citations52
US10620546B2Apr 14, 2020
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US10509326B2Dec 17, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10274832B2Apr 30, 2019
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9964861B2May 8, 2018
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9798247B2Oct 24, 2017
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9645507B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9261797B2Feb 16, 2016
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US8045137B2Oct 25, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
JANSEN HANS
4 patentsUS8941811B2Jan 27, 2015
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8638419B2Jan 28, 2014
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8115899B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations73
US8859188B2Oct 14, 2014
Immersion liquid, exposure apparatus, and exposure process
JANSEN HANS2 citations62
DIERICHS MARCEL MATHIJS THEODORE MARIE
3 patentsUS9025127B2May 5, 2015
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8953144B2Feb 10, 2015
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8629971B2Jan 14, 2014
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE9 citations83
CADEE THEODORUS PETRUS MARIA
2 patentsSTAVENGA MARCO KOERT
2 patentsVERSPAY JACOBUS JOHANNUS LEONARDUS HENDRICUS
1 patentVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
1 patentCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE
1 patentVERHAGEN MARTINUS CORNELIS MARIA
1 patentGOSEN JEROEN GERARD
1 patentShowing the top 50 of 61 patents by PatentIndex Score.