Inventor
KEMPER NICOLAAS RUDOLF
NL89 patents
⚠️ This page may combine multiple inventors who share the name “KEMPER NICOLAAS RUDOLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
38 patentsUS7864292B2Jan 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV57 citations98
US7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7839483B2Nov 23, 2010
Lithographic apparatus, device manufacturing method and a control system
ASML NETHERLANDS BV16 citations93
US8031325B2Oct 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US8027019B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7705962B2Apr 27, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations92
US7656501B2Feb 2, 2010
Lithographic apparatus
ASML NETHERLANDS BV22 citations92
US7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US7359032B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations90
US9857695B2Jan 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9488923B2Nov 8, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9140996B2Sep 22, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations84
US7834974B2Nov 16, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations84
US7420194B2Sep 2, 2008
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV10 citations84
US8345218B2Jan 1, 2013
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7760324B2Jul 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations82
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US7414699B2Aug 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US10495984B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9448494B2Sep 20, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations73
US7808614B2Oct 5, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations72
US10191396B2Jan 29, 2019
Lithographic apparatus, object positioning system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9946172B2Apr 17, 2018
System for positioning an object in lithography
ASML NETHERLANDS BV2 citations71
US11187991B2Nov 30, 2021
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations70
US6933513B2Aug 23, 2005
Gas flushing system for use in lithographic apparatus
ASML NETHERLANDS BV9 citations69
US11789369B2Oct 17, 2023
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US11209738B2Dec 28, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US9766556B2Sep 19, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US8003968B2Aug 23, 2011
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV3 citations63
US6937316B2Aug 30, 2005
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations63
US12117721B2Oct 15, 2024
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11537038B2Dec 27, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US11143968B2Oct 12, 2021
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
KEMPER NICOLAAS RUDOLF
5 patentsUS8446563B2May 21, 2013
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations83
US8953142B2Feb 10, 2015
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations82
US9477158B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF2 citations62
US9099501B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF3 citations62
US8755028B2Jun 17, 2014
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations62
RIEPEN MICHEL
2 patentsLEENDERS MARTINUS HENDRIKUS ANTONIUS
1 patentJACOBS JOHANNES HENRICUS WILHELMUS
1 patentDIRECKS DANIEL JOZEF MARIA
1 patentGROUWSTRA CÉDRIC DÉSIRÉ
1 patentCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE
1 patentShowing the top 50 of 89 patents by PatentIndex Score.