Inventor
LEENDERS MARTINUS HENDRIKUS ANTONIUS
NL104 patents
⚠️ This page may combine multiple inventors who share the name “LEENDERS MARTINUS HENDRIKUS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
35 patentsUS7864292B2Jan 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV57 citations98
US7433016B2Oct 7, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7839483B2Nov 23, 2010
Lithographic apparatus, device manufacturing method and a control system
ASML NETHERLANDS BV16 citations93
US7474379B2Jan 6, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations93
US7978306B2Jul 12, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations92
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7656501B2Feb 2, 2010
Lithographic apparatus
ASML NETHERLANDS BV22 citations92
US10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US9952514B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9606449B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9140996B2Sep 22, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations84
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US9989858B2Jun 5, 2018
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate
ASML NETHERLANDS BV5 citations82
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US7903232B2Mar 8, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7929112B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US10684554B2Jun 16, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US7928407B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US12007699B2Jun 11, 2024
Vessel for a radiation source
ASML NETHERLANDS BV2 citations71
US10649349B2May 12, 2020
Lithographic apparatus, a dryer and a method of removing liquid from a surface
ASML NETHERLANDS BV2 citations71
US10185231B2Jan 22, 2019
Lithographic apparatus, a dryer and a method of removing liquid from a surface
ASML NETHERLANDS BV2 citations71
US10712656B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV4 citations70
US10514615B2Dec 24, 2019
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations69
US11789369B2Oct 17, 2023
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US11327404B2May 10, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US11209738B2Dec 28, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US11016394B2May 25, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US9581916B2Feb 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US9477153B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US8023101B2Sep 20, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US8003968B2Aug 23, 2011
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV3 citations63
US7492443B2Feb 17, 2009
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV3 citations63
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
LEENDERS MARTINUS HENDRIKUS ANTONIUS
4 patentsUS8144305B2Mar 27, 2012
Lithographic apparatus and device manufacturing method
LEENDERS MARTINUS HENDRIKUS ANTONIUS14 citations92
US8786823B2Jul 22, 2014
Lithographic apparatus and device manufacturing method
LEENDERS MARTINUS HENDRIKUS ANTONIUS7 citations84
US8421996B2Apr 16, 2013
Lithographic apparatus
LEENDERS MARTINUS HENDRIKUS ANTONIUS7 citations81
US9632425B2Apr 25, 2017
Lithographic apparatus, a dryer and a method of removing liquid from a surface
LEENDERS MARTINUS HENDRIKUS ANTONIUS2 citations71
JACOBS JOHANNES HENRICUS WILHELMUS
2 patentsSTREEFKERK BOB
2 patentsKEMPER NICOLAAS RUDOLF
1 patentWATSO ROBERT DOUGLAS
1 patentCOMPEN RENE THEODORUS PETRUS
1 patentDZIOMKINA NINA VLADIMIROVNA
1 patentDE GRAAF ROELOF FREDERIK
1 patentDE JONG FREDERIK EDUARD
1 patentHOEKERD KORNELIS TIJMEN
1 patentShowing the top 50 of 104 patents by PatentIndex Score.