Inventor
LIEBREGTS PAULUS MARTINUS MARIA
NL27 patents
⚠️ This page may combine multiple inventors who share the name “LIEBREGTS PAULUS MARTINUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US10620544B2Apr 14, 2020
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US9846372B2Dec 19, 2017
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations72
US9477153B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US7924403B2Apr 12, 2011
Lithographic apparatus and device and device manufacturing method
ASML NETHERLANDS BV3 citations63
US10488759B2Nov 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10451973B2Oct 22, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10209624B2Feb 19, 2019
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50