Inventor
MULKENS JOHANNES CATHARINUS HUBERTUS
NL156 patents
⚠️ This page may combine multiple inventors who share the name “MULKENS JOHANNES CATHARINUS HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
33 patentsUS7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7589818B2Sep 15, 2009
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus
ASML NETHERLANDS BV66 citations98
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7880860B2Feb 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations96
US7463330B2Dec 9, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV48 citations96
US7433015B2Oct 7, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV39 citations96
US7545481B2Jun 9, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations95
US7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US9360765B2Jun 7, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations93
US9097987B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7932999B2Apr 26, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US7616383B2Nov 10, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations93
US9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US7898642B2Mar 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations92
US7868998B2Jan 11, 2011
Lithographic apparatus
ASML NETHERLANDS BV9 citations92
US7715107B2May 11, 2010
Optical element for correction of aberration, and a lithographic apparatus comprising same
ASML NETHERLANDS BV21 citations92
US9507907B2Nov 29, 2016
Computational wafer inspection
ASML NETHERLANDS BV18 citations91
US10527955B2Jan 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9703210B2Jul 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US7843551B2Nov 30, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations84
US10579772B2Mar 3, 2020
Computational wafer inspection
ASML NETHERLANDS BV7 citations82
US9990462B2Jun 5, 2018
Computational wafer inspection
ASML NETHERLANDS BV8 citations82
LOF JOERI
6 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
STREEFKERK BOB
3 patentsUS8634056B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB10 citations92
US8547519B2Oct 1, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB8 citations84
US8587762B2Nov 19, 2013
Methods relating to immersion lithography and an immersion lithographic apparatus
STREEFKERK BOB15 citations83
MULKENS JOHANNES CATHARINUS HUBERTUS
2 patentsUS9417519B2Aug 16, 2016
Lithographic apparatus, device manufacturing method, and method of correcting a mask
MULKENS JOHANNES CATHARINUS HUBERTUS5 citations84
US8964163B2Feb 24, 2015
Immersion lithographic apparatus and device manufacturing method with a projection system having a part movable relative to another part
MULKENS JOHANNES CATHARINUS HUBERTUS4 citations84
LOOPSTRA ERIK ROELOF
2 patentsJANSEN HANS
2 patentsHOOGENDAM CHRISTIAAN ALEXANDER
1 patentRIEPEN MICHEL
1 patentShowing the top 50 of 156 patents by PatentIndex Score.