Inventor
EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA
NL41 patents
⚠️ This page may combine multiple inventors who share the name “EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
30 patentsUS10416571B2Sep 17, 2019
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV4 citations82
US11231653B2Jan 25, 2022
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10969695B2Apr 6, 2021
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US11187991B2Nov 30, 2021
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations70
US10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US10216100B2Feb 26, 2019
Inspection substrate and an inspection method
ASML NETHERLANDS BV2 citations69
US11199771B2Dec 14, 2021
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
US12429778B2Sep 30, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US11614689B2Mar 28, 2023
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12529964B2Jan 20, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11720032B2Aug 8, 2023
Process tool and an inspection method
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US12072635B2Aug 27, 2024
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations58
US12287570B2Apr 29, 2025
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US12287580B2Apr 29, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations56
US9291914B2Mar 22, 2016
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations51
US12566382B2Mar 3, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10725390B2Jul 28, 2020
Inspection substrate and an inspection method
ASML NETHERLANDS BV0 citations48
US12443115B2Oct 14, 2025
Measurement system and method for characterizing a patterning device
ASML NETHERLANDS BV0 citations47
US11048178B2Jun 29, 2021
Lithographic apparatus with improved patterning performance
ASML NETHERLANDS BV0 citations46
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10095129B2Oct 9, 2018
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus
ASML NETHERLANDS BV0 citations40