P

Inventor

SHULEPOV SERGEI

NL49 patents
⚠️ This page may combine multiple inventors who share the name “SHULEPOV SERGEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

22 patents
US7528929B2May 5, 2009

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV46 citations95
US9134622B2Sep 15, 2015

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV9 citations92
US8027019B2Sep 27, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV15 citations92
US7804577B2Sep 28, 2010

Lithographic apparatus

ASML NETHERLANDS BV26 citations92
US10345712B2Jul 9, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations84
US9134623B2Sep 15, 2015

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV8 citations84
US7834974B2Nov 16, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV9 citations84
US9927715B2Mar 27, 2018

Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus

ASML NETHERLANDS BV2 citations73
US9448494B2Sep 20, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations73
US9766556B2Sep 19, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations63
US8023101B2Sep 20, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations63
US12117721B2Oct 15, 2024

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations62
US11537038B2Dec 27, 2022

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations62
USRE48676EAug 10, 2021

Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations62
US12197140B2Jan 14, 2025

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61
US11215933B2Jan 4, 2022

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61
US10871714B2Dec 22, 2020

Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus

ASML NETHERLANDS BV0 citations52
US10802410B2Oct 13, 2020

Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid

ASML NETHERLANDS BV0 citations52
USRE47237EFeb 12, 2019

Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US10451980B2Oct 22, 2019

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50
US9625833B2Apr 18, 2017

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

KONINKLIJKE PHILIPS NV

11 patents

KEMPER NICOLAAS RUDOLF

4 patents

LEENDERS MARTINUS HENDRIKUS ANTONIUS

3 patents

STREEFKERK BOB

2 patents

STAVENGA MARCO KOERT

2 patents

VAN DER HAM RONALD

1 patent

ROSET NIEK JACOBUS JOHANNES

1 patent

VAN DEN BIJGAART ADRIANUS WILHELMUS DIONISIUS MARI

1 patent

VAN DOORN ARIE R

1 patent

DIRECKS DANIEL JOZEF MARIA

1 patent