Inventor
STEFFENS KOEN
NL34 patents
⚠️ This page may combine multiple inventors who share the name “STEFFENS KOEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
19 patentsUS8351018B2Jan 8, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations91
US9823589B2Nov 21, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations83
US9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US12197140B2Jan 14, 2025
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US11215933B2Jan 4, 2022
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10203611B2Feb 12, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10451980B2Oct 22, 2019
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10018925B2Jul 10, 2018
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9625833B2Apr 18, 2017
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9606429B2Mar 28, 2017
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10591828B2Mar 17, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations49
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40