Inventor

MEIJERS RALPH JOSEPH

NL4 patents

⚠️ This page may combine multiple inventors who share the name “MEIJERS RALPH JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RIEPEN MICHEL

1 patent

US8614784B2Dec 24, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply

RIEPEN MICHEL14 citations82

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent

US8902400B2Dec 2, 2014

Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus

LAFARRE RAYMOND WILHELMUS LOUIS4 citations71

STAVENGA MARCO KOERT

1 patent

US8405817B2Mar 26, 2013

Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method

STAVENGA MARCO KOERT4 citations58

SEWELL HARRY

1 patent

US8451422B2May 28, 2013

Re-flow and buffer system for immersion lithography

SEWELL HARRY0 citations39