Inventor

EVANGELISTA FABRIZIO

NL11 patents

⚠️ This page may combine multiple inventors who share the name “EVANGELISTA FABRIZIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US10620544B2Apr 14, 2020

Fluid handling structure, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations72

US9846372B2Dec 19, 2017

Fluid handling structure, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations72

US11143968B2Oct 12, 2021

Fluid handling structure, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US10209624B2Feb 19, 2019

Fluid handling structure, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations51

US9470985B2Oct 18, 2016

Lithographic apparatus, sensor and method

ASML NETHERLANDS BV1 citations46

RIEPEN MICHEL

2 patents

US8614784B2Dec 24, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply

RIEPEN MICHEL14 citations82

US9625828B2Apr 18, 2017

Fluid handling structure, lithographic apparatus and device manufacturing method

RIEPEN MICHEL0 citations49

CORTIE ROGIER HENDRIKUS MAGDALENA

1 patent

US9256136B2Feb 9, 2016

Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply

CORTIE ROGIER HENDRIKUS MAGDALENA7 citations82

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent

US8902400B2Dec 2, 2014

Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus

LAFARRE RAYMOND WILHELMUS LOUIS4 citations71

STAVENGA MARCO KOERT

1 patent

US8405817B2Mar 26, 2013

Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method

STAVENGA MARCO KOERT4 citations58

DIRECKS DANIEL JOZEF MARIA

1 patent

US9383654B2Jul 5, 2016

Fluid handling structure, lithographic apparatus and device manufacturing method

DIRECKS DANIEL JOZEF MARIA0 citations49