Inventor

OTOTAKE TARO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OTOTAKE TARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

3 patents

US5786897AJul 28, 1998

Method and device for measuring pattern coordinates of a pattern formed on a pattern surface of a substrate

NIKON CORP38 citations89

US5386294AJan 31, 1995

Pattern position measuring apparatus

NIKON CORP86 citations88

US5459577AOct 17, 1995

Method of and apparatus for measuring pattern positions

NIKON CORP15 citations71

NIPPON KOGAKU KK

1 patent

US4730927AMar 15, 1988

Method and apparatus for measuring positions on the surface of a flat object

NIPPON KOGAKU KK22 citations78