Inventor
BESSEMS DAVID
NL21 patents
⚠️ This page may combine multiple inventors who share the name “BESSEMS DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US12197140B2Jan 14, 2025
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11215933B2Jan 4, 2022
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11500297B2Nov 15, 2022
Anti-rotation coupling
ASML NETHERLANDS BV0 citations54
US11774012B2Oct 3, 2023
Apparatus for high pressure connection
ASML NETHERLANDS BV0 citations53
US9291914B2Mar 22, 2016
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations51
US10451980B2Oct 22, 2019
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9625833B2Apr 18, 2017
Substrate table, immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10437162B2Oct 8, 2019
Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system
ASML NETHERLANDS BV0 citations44
US11963285B2Apr 16, 2024
Target material control in an EUV light source
ASML NETHERLANDS BV0 citations40
BESSEMS DAVID
3 patentsUS8836912B2Sep 16, 2014
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID6 citations81
US9625829B2Apr 18, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID1 citations49
US9563132B2Feb 7, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID0 citations38
STAVENGA MARCO KOERT
2 patentsVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
2 patentsUS8114568B2Feb 14, 2012
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS12 citations77
US8394572B2Mar 12, 2013
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS0 citations45