Inventor
JOCHEMSEN MARINUS
NL26 patents
⚠️ This page may combine multiple inventors who share the name “JOCHEMSEN MARINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
24 patentsUS11067902B2Jul 20, 2021
Computational metrology
ASML NETHERLANDS BV9 citations85
US10712672B2Jul 14, 2020
Method of predicting patterning defects caused by overlay error
ASML NETHERLANDS BV7 citations84
US10859926B2Dec 8, 2020
Methods for defect validation
ASML NETHERLANDS BV7 citations79
US11681229B2Jun 20, 2023
Selection of measurement locations for patterning processes
ASML NETHERLANDS BV1 citations73
US11443083B2Sep 13, 2022
Identification of hot spots or defects by machine learning
ASML NETHERLANDS BV2 citations73
US10962886B2Mar 30, 2021
Selection of measurement locations for patterning processes
ASML NETHERLANDS BV1 citations73
US10394136B2Aug 27, 2019
Metrology method for process window definition
ASML NETHERLANDS BV2 citations73
US10852646B2Dec 1, 2020
Displacement based overlay or alignment
ASML NETHERLANDS BV2 citations72
US11768442B2Sep 26, 2023
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV1 citations71
US11513442B2Nov 29, 2022
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US12461451B2Nov 4, 2025
Computational metrology
ASML NETHERLANDS BV0 citations62
US12360461B2Jul 15, 2025
Identification of hot spots or defects by machine learning
ASML NETHERLANDS BV0 citations62
US12228862B2Feb 18, 2025
Selection of measurement locations for patterning processes
ASML NETHERLANDS BV0 citations62
US11520239B2Dec 6, 2022
Separation of contributions to metrology data
ASML NETHERLANDS BV1 citations62
US12197136B2Jan 14, 2025
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV0 citations61
US11314174B2Apr 26, 2022
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations60
US11442367B2Sep 13, 2022
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV0 citations59
US11106141B2Aug 31, 2021
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV1 citations59
US11048174B2Jun 29, 2021
Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program
ASML NETHERLANDS BV1 citations56
US9964865B2May 8, 2018
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus
ASML NETHERLANDS BV0 citations51
US12468234B2Nov 11, 2025
Method of controlling a patterning process, device manufacturing method
ASML NETHERLANDS BV0 citations49
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49
US10725372B2Jul 28, 2020
Method and apparatus for reticle optimization
ASML NETHERLANDS BV0 citations49
US10459345B2Oct 29, 2019
Focus-dose co-optimization based on overlapping process window
ASML NETHERLANDS BV0 citations34