Inventor

GUNTER PIETER LEIN JOSEPH

NL7 patents

⚠️ This page may combine multiple inventors who share the name “GUNTER PIETER LEIN JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US10520837B2Dec 31, 2019

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations71

US11300890B2Apr 12, 2022

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US10534270B2Jan 14, 2020

Lithography apparatus, a method of manufacturing a device and a control program

ASML NETHERLANDS BV0 citations46

US10261422B2Apr 16, 2019

Lithography apparatus and method of manufacturing a device

ASML NETHERLANDS BV0 citations46

STAVENGA MARCO KOERT

1 patent

US8405817B2Mar 26, 2013

Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method

STAVENGA MARCO KOERT4 citations58

KUNNEN JOHAN GERTRUDIS CORNELIS

1 patent

US9897928B2Feb 20, 2018

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

KUNNEN JOHAN GERTRUDIS CORNELIS1 citations49

THOMAS IVO ADAM JOHANNES

1 patent

US9904177B2Feb 27, 2018

Fluid handling structure, a lithographic apparatus and a device manufacturing method

THOMAS IVO ADAM JOHANNES0 citations35