P

Inventor

GROVER GAUTAM S

US4 patents
⚠️ This page may combine multiple inventors who share the name “GROVER GAUTAM S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

3 patents
US6689692B1Feb 10, 2004

Composition for oxide CMP

CABOT MICROELECTRONICS CORP56 citations95
US6984588B2Jan 10, 2006

Compositions for oxide CMP

CABOT MICROELECTRONICS CORP21 citations92
US6872328B2Mar 29, 2005

Method of polishing or planarizing a substrate

CABOT MICROELECTRONICS CORP8 citations71

CABOT CORP

1 patent
US5759917AJun 2, 1998

Composition for oxide CMP

CABOT CORP245 citations97