Inventor
SOWA SOSUKE
JP2 patents
Patents
2 patentsUS6516743B2Feb 11, 2003
Method and apparatus diffusing zinc into groups III-V compound semiconductor crystals
SUMITOMO ELECTRIC INDUSTRIES6 citations69
US6214708B1Apr 10, 2001
Method and apparatus for diffusing zinc into groups III-V compound semiconductor crystals
SUMITOMO ELECTRIC INDUSTRIES6 citations69