Inventor
MIYANAGA AKIRA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “MIYANAGA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
2 patentsUS6156627ADec 5, 2000
Method of promoting crystallization of an amorphous semiconductor film using organic metal CVD
SEMICONDUCTOR ENERGY LAB28 citations92
US6974763B1Dec 13, 2005
Method of forming semiconductor device by crystallizing amorphous silicon and forming crystallization promoting material in the same chamber
SEMICONDUCTOR ENERGY LAB8 citations73