Inventor

PENIGALAPATI DINESH K

US4 patents

⚠️ This page may combine multiple inventors who share the name “PENIGALAPATI DINESH K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARNS LESLIE

2 patents

US8524606B2Sep 3, 2013

Chemical mechanical planarization with overburden mask

CHARNS LESLIE11 citations80

US8497210B2Jul 30, 2013

Shallow trench isolation chemical mechanical planarization

CHARNS LESLIE2 citations58

CHANG JOSEPHINE B

1 patent

US8513127B2Aug 20, 2013

Chemical mechanical planarization processes for fabrication of FinFET devices

CHANG JOSEPHINE B10 citations82

ANDO TAKASHI

1 patent

US8507383B2Aug 13, 2013

Fabrication of replacement metal gate devices

ANDO TAKASHI0 citations50