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Inventor
PERLE MARC
DE
2 patents
Patents
2 patents
US9343337B2
May 17, 2016
Device and method for coating a substrate using CVD
RUEFFER MARTIN
0 citations
37
US9127350B2
Sep 8, 2015
Device and method for coating a substrate using CVD
RUEFFER MARTIN
0 citations
37