Inventor
Li ming-hui
TW4 patents
Patents
4 patentsUS10651003B2May 12, 2020
Ion implanting method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9922800B2Mar 20, 2018
System and method for generating ions in an ion source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US10748809B2Aug 18, 2020
Semiconductor structure including inter-layer dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10177026B2Jan 8, 2019
Semiconductor structure and fabrication method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41