Inventor

TSAI CHI-KUANG

TW2 patents

Patents

2 patents

US11048158B2Jun 29, 2021

Method for extreme ultraviolet lithography mask treatment

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70

US11906897B2Feb 20, 2024

Method for extreme ultraviolet lithography mask treatment

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60