Inventor
VIATKINA EKATERINA MIKHAILOVNA
NL3 patents
Patents
3 patentsUS11048174B2Jun 29, 2021
Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program
ASML NETHERLANDS BV1 citations56
US11709432B2Jul 25, 2023
Method to characterize post-processing data in terms of individual contributions from processing stations
ASML NETHERLANDS BV0 citations45
US12276919B2Apr 15, 2025
Method for controlling a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations44