Inventor
JUNG YONGSEOK
KR6 patents
⚠️ This page may combine multiple inventors who share the name “JUNG YONGSEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS10274820B2Apr 30, 2019
Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same
SAMSUNG ELECTRONICS CO LTD1 citations56
US11333979B2May 17, 2022
Methods of forming a pattern and methods of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US9411236B2Aug 9, 2016
Patterning method using electron beam and exposure system configured to perform the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US9164389B2Oct 20, 2015
Patterning method using electron beam and exposure system configured to perform the same
SAMSUNG ELECTRONICS CO LTD0 citations49