Inventor

KWON SUNGWON

KR4 patents

⚠️ This page may combine multiple inventors who share the name “KWON SUNGWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US10274820B2Apr 30, 2019

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

SAMSUNG ELECTRONICS CO LTD1 citations56

US10620529B2Apr 14, 2020

Photomasks

SAMSUNG ELECTRONICS CO LTD0 citations39

JEON HWANCHUL

1 patent

US9952502B2Apr 24, 2018

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

JEON HWANCHUL2 citations61

JUNG YONGSEOK

1 patent

US10224178B2Mar 5, 2019

Methods, systems and computer program products configured to adjust a critical dimension of reticle patterns used to fabricate semiconductor devices

JUNG YONGSEOK1 citations51