Inventor
KIM HEEBOM
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KIM HEEBOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS10866507B2Dec 15, 2020
Pellicle and reticle including the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US11409193B2Aug 9, 2022
Reticle in an apparatus for extreme ultraviolet exposure
SAMSUNG ELECTRONICS CO LTD0 citations55
US11086210B2Aug 10, 2021
Photomask, method of fabricating the same, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations55
US7629087B2Dec 8, 2009
Photomask, method of making a photomask and photolithography method and system using the same
SAMSUNG ELECTRONICS CO LTD4 citations54