Inventor

ONOZUKA TOSHIHIKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “ONOZUKA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

3 patents

US7501347B2Mar 10, 2009

Semiconductor device and manufacturing method of the same

HITACHI LTD23 citations92

US5725971AMar 10, 1998

Method of manufacturing phase shift masks and a method of manufacturing semiconductor integrated circuit devices

HITACHI LTD22 citations91

US7911055B2Mar 22, 2011

Semiconductor device and manufacturing method of the same

HITACHI LTD0 citations51

NOGUCHI JUNJI

2 patents

US8586447B2Nov 19, 2013

Semiconductor device and manufacturing method of the same

NOGUCHI JUNJI6 citations83

US8247902B2Aug 21, 2012

Semiconductor device and manufacturing method of the same

NOGUCHI JUNJI10 citations83

NITTO DENKO CORP

1 patent

US6040110AMar 21, 2000

Process and apparatus for the removal of resist

NITTO DENKO CORP12 citations69

KAKUTA KAZUYUKI

1 patent

US9390934B2Jul 12, 2016

Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor device

KAKUTA KAZUYUKI0 citations30