Inventor
CHUNG JESSE
TW3 patents
Patents
3 patentsUS6391706B2May 21, 2002
Method for making deep trench capacitors for DRAMs with reduced faceting at the substrate edge and providing a more uniform pad Si3N4layer across the substrate
PROMOS TECHNOLOGIES INC26 citations90
US6444524B1Sep 3, 2002
Method for forming a trench capacitor
PROMOS TECHNOLOGIES INC11 citations71
US6734106B2May 11, 2004
Method of buried strap out-diffusion formation by gas phase doping
PROMOS TECHNOLOGIES INC7 citations70