Inventor
ELMUFDI CAROLINA L
US7 patents
⚠️ This page may combine multiple inventors who share the name “ELMUFDI CAROLINA L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MAT
4 patentsUS7267610B1Sep 11, 2007
CMP pad having unevenly spaced grooves
ROHM & HAAS ELECT MAT46 citations92
US7059949B1Jun 13, 2006
CMP pad having an overlapping stepped groove arrangement
ROHM & HAAS ELECT MAT26 citations92
US7131895B2Nov 7, 2006
CMP pad having a radially alternating groove segment configuration
ROHM & HAAS ELECT MAT12 citations82
US7270595B2Sep 18, 2007
Polishing pad with oscillating path groove network
ROHM & HAAS ELECT MAT7 citations71