Inventor
LIU HUI-TANG
TW4 patents
Patents
4 patentsUS6931303B2Aug 16, 2005
Integrated transport system
TAIWAN SEMICONDUCTOR MFG15 citations79
US7269469B2Sep 11, 2007
System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
TAIWAN SEMICONDUCTOR MFG4 citations58
US7203563B2Apr 10, 2007
Automatic N2 purge system for 300 mm full automation fab
TAIWAN SEMICONDUCTOR MFG3 citations58
US7077310B2Jul 18, 2006
Dual ID verification system and switching method therefor
TAIWAN SEMICONDUCTOR MFG0 citations44