Inventor

PARK GYU-DONG

KR2 patents

Patents

2 patents

US6787285B2Sep 7, 2004

Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator

HYNIX SEMICONDUCTOR INC4 citations59

US7534553B2May 19, 2009

Method for fabricating semiconductor device

HYNIX SEMICONDUCTOR INC0 citations35