Inventor
LIM JUNG-TAEK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “LIM JUNG-TAEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS6495055B2Dec 17, 2002
Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner
SAMSUNG ELECTRONICS CO LTD2 citations60
US7747063B2Jun 29, 2010
Method and apparatus for inspecting a substrate
SAMSUNG ELECTRONICS CO LTD4 citations59
US7626164B2Dec 1, 2009
Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics
SAMSUNG ELECTRONICS CO LTD0 citations39
US7498248B2Mar 3, 2009
Methods of compensating for an alignment error during fabrication of structures on semiconductor substrates
SAMSUNG ELECTRONICS CO LTD0 citations38