Inventor
YOON YOUNG-JEE
KR5 patents
Patents
5 patentsUS7697130B2Apr 13, 2010
Apparatus and method for inspecting a surface of a wafer
SAMSUNG ELECTRONICS CO LTD3 citations61
US7747063B2Jun 29, 2010
Method and apparatus for inspecting a substrate
SAMSUNG ELECTRONICS CO LTD4 citations59
US9892983B2Feb 13, 2018
Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US7626164B2Dec 1, 2009
Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics
SAMSUNG ELECTRONICS CO LTD0 citations39
US7498248B2Mar 3, 2009
Methods of compensating for an alignment error during fabrication of structures on semiconductor substrates
SAMSUNG ELECTRONICS CO LTD0 citations38