Inventor

SPRINGER DAVID L

PA4 patents

⚠️ This page may combine multiple inventors who share the name “SPRINGER DAVID L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XACTIX INC

2 patents

US7638435B2Dec 29, 2009

Pulsed etching cooling

XACTIX INC6 citations69

US8377253B2Feb 19, 2013

Pulsed etching cooling

XACTIX INC2 citations58

LEBOUITZ KYLE S

2 patents

US8257602B2Sep 4, 2012

Pulsed-continuous etching

LEBOUITZ KYLE S2 citations57

US8703003B2Apr 22, 2014

Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers

LEBOUITZ KYLE S0 citations36