Inventor

MORISAWA TAKU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MORISAWA TAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HASEGAWA KOJI

2 patents

US8916331B2Dec 23, 2014

Resist composition and patterning process

HASEGAWA KOJI5 citations71

US8945809B2Feb 3, 2015

Fluorinated monomer, fluorinated polymer, resist composition, and patterning process

HASEGAWA KOJI0 citations40

SHINETSU CHEMICAL CO

2 patents

US9201301B2Dec 1, 2015

Method for producing resist composition

SHINETSU CHEMICAL CO1 citations51

US9502247B2Nov 22, 2016

Method for forming coating film for lithography

SHINETSU CHEMICAL CO0 citations49

HATAKEYAMA JUN

1 patent

US8778592B2Jul 15, 2014

Positive resist composition and patterning process

HATAKEYAMA JUN3 citations61