Inventor
YANAGISAWA MICHIO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YANAGISAWA MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS6473159B1Oct 29, 2002
Anti-vibration system in exposure apparatus
CANON KK38 citations91
US8964290B2Feb 24, 2015
Microscope
CANON KK0 citations40
US8916840B2Dec 23, 2014
Lithography apparatus, and article manufacturing method
CANON KK0 citations38
US10638021B2Apr 28, 2020
Measurement device, processing device, and article manufacturing method
CANON KK0 citations37