Inventor

VAN BANNING DENNIS HERMAN CASPAR

NL7 patents

Patents

7 patents

US12354891B2Jul 8, 2025

Particle beam inspection apparatus

ASML NETHERLANDS BV0 citations59

US11942340B2Mar 26, 2024

Particle beam inspection apparatus

ASML NETHERLANDS BV0 citations59

US11430678B2Aug 30, 2022

Particle beam inspection apparatus

ASML NETHERLANDS BV0 citations59

US11385556B2Jul 12, 2022

Particle beam apparatus

ASML NETHERLANDS BV0 citations59

US12051607B2Jul 30, 2024

Substrate positioning device with remote temperature sensor

ASML NETHERLANDS BV0 citations58

US11764027B2Sep 19, 2023

Systems and methods of cooling objective lens of a charged-particle beam system

ASML NETHERLANDS BV0 citations57

US11158484B2Oct 26, 2021

Electron beam inspection tool and method of controlling heat load

ASML NETHERLANDS BV0 citations55