Inventor
LEE HYO CHANG
KR3 patents
Patents
3 patentsUS11735397B2Aug 22, 2023
Device for measuring plasma ion density and apparatus for diagnosing plasma using the same
KOREA RES INST STANDARDS & SCI0 citations52
US11211231B2Dec 28, 2021
Plasma generation apparatus
KOREA RES INST STANDARDS & SCI0 citations44
US11867643B2Jan 9, 2024
Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried
KOREA RES INST STANDARDS & SCI0 citations42