Inventor
OHNO YASUNORI
JP8 patents
Patents
8 patentsUS5064520ANov 12, 1991
Method and apparatus for forming a film
HITACHI LTD78 citations95
US4716491ADec 29, 1987
High frequency plasma generation apparatus
HITACHI LTD110 citations95
US5266146ANov 30, 1993
Microwave-powered plasma-generating apparatus and method
HITACHI LTD35 citations92
US5133825AJul 28, 1992
Plasma generating apparatus
HITACHI LTD54 citations92
US4739169AApr 19, 1988
Ion source
HITACHI LTD36 citations92
US4713585ADec 15, 1987
Ion source
HITACHI LTD42 citations92
US5085755AFeb 4, 1992
Sputtering apparatus for forming thin films
HITACHI LTD16 citations72
US4847476AJul 11, 1989
Ion source device
HITACHI LTD17 citations71