Inventor
COWEN ALLEN
US4 patents
⚠️ This page may combine multiple inventors who share the name “COWEN ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JDS UNIPHASE CORP
3 patentsUS6410361B2Jun 25, 2002
Methods of fabricating in-plane MEMS thermal actuators
JDS UNIPHASE CORP48 citations95
US6333583B1Dec 25, 2001
Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams
JDS UNIPHASE CORP56 citations95
US6367252B1Apr 9, 2002
Microelectromechanical actuators including sinuous beam structures
JDS UNIPHASE CORP37 citations92