Inventor
IVASCHENKO ALEX P
US8 patents
Patents
8 patentsUS6442181B1Aug 27, 2002
Extreme repetition rate gas discharge laser
CYMER INC56 citations95
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6795474B2Sep 21, 2004
Gas discharge laser with improved beam path
CYMER INC46 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US6425559B1Jul 30, 2002
Gas laser chamber with vertical vibration isolator
CYMER INC9 citations73
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60