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Inventor
CHANG YOUN-GYUNG
KR
2 patents
Patents
2 patents
US7915114B2
Mar 29, 2011
Low temperature process for TFT fabrication
APPLIED MATERIALS INC
6 citations
72
US7300829B2
Nov 27, 2007
Low temperature process for TFT fabrication
APPLIED MATERIALS INC
6 citations
72