Inventor

KOTELYANSKII MICHAEL J

US4 patents

⚠️ This page may combine multiple inventors who share the name “KOTELYANSKII MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WOLF ROBERT GREGORY

2 patents

US8699027B2Apr 15, 2014

Multiple measurement techniques including focused beam scatterometry for characterization of samples

WOLF ROBERT GREGORY9 citations79

US8139232B2Mar 20, 2012

Multiple measurement techniques including focused beam scatterometry for characterization of samples

WOLF ROBERT GREGORY19 citations79

COLGAN MICHAEL

1 patent

US9041931B2May 26, 2015

Substrate analysis using surface acoustic wave metrology

COLGAN MICHAEL7 citations75

RUDOLPH TECHNOLOGIES INC

1 patent

US7903238B2Mar 8, 2011

Combination of ellipsometry and optical stress generation and detection

RUDOLPH TECHNOLOGIES INC0 citations31