Inventor

CHOU SHANG-I

US7 patents

⚠️ This page may combine multiple inventors who share the name “CHOU SHANG-I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US8624210B2Jan 7, 2014

Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates

LAM RES CORP5 citations66

US9412670B2Aug 9, 2016

System, method and apparatus for RF power compensation in plasma etch chamber

LAM RES CORP2 citations57

US12567566B2Mar 3, 2026

Wide-coverage edge ring for enhanced shielding in substrate processing systems

LAM RES CORP0 citations44

SANT SANKET

1 patent

US8232538B2Jul 31, 2012

Method and apparatus of halogen removal using optimal ozone and UV exposure

SANT SANKET9 citations81

WANG YEN-KUN VICTOR

1 patent

US8492736B2Jul 23, 2013

Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates

WANG YEN-KUN VICTOR10 citations78

O'NEILL ROBERT GRIFFITH

1 patent

US8060330B2Nov 15, 2011

Method and system for centering wafer on chuck

O'NEILL ROBERT GRIFFITH12 citations78

SINGH HARMEET

1 patent

US8525139B2Sep 3, 2013

Method and apparatus of halogen removal

SINGH HARMEET3 citations60