Inventor
DOI KENTA
JP5 patents
Patents
5 patentsUS12469711B2Nov 11, 2025
Etching method
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US12020942B2Jun 25, 2024
Etching method
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US12205795B2Jan 21, 2025
Plasma processing device
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US11665809B2May 30, 2023
High-frequency power circuit, plasma treatment apparatus, and plasma treatment method
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US12217969B2Feb 4, 2025
Silicon dry etching method
ULVAC INC0 citations45